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Sensors 2014, 14(7), 12735-12747; doi:10.3390/s140712735
Article

An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process

1
, 1,*  and 2
Received: 27 May 2014; in revised form: 12 July 2014 / Accepted: 15 July 2014 / Published: 17 July 2014
(This article belongs to the Section Physical Sensors)
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Abstract: This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm.
Keywords: acetone microsensor; α-Fe2O3; ring oscillator circuit acetone microsensor; α-Fe2O3; ring oscillator circuit
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Yang, M.-Z.; Dai, C.-L.; Shih, P.-J. An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors 2014, 14, 12735-12747.

AMA Style

Yang M-Z, Dai C-L, Shih P-J. An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors. 2014; 14(7):12735-12747.

Chicago/Turabian Style

Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen. 2014. "An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process." Sensors 14, no. 7: 12735-12747.


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