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Sensors 2013, 13(10), 12760-12770; doi:10.3390/s131012760

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

*  and
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
* Author to whom correspondence should be addressed.
Received: 6 August 2013 / Revised: 11 September 2013 / Accepted: 17 September 2013 / Published: 25 September 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
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The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.
Keywords: ethanol sensor; zinc oxide film; heater; post-process ethanol sensor; zinc oxide film; heater; post-process
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Liao, W.-Z.; Dai, C.-L.; Yang, M.-Z. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors 2013, 13, 12760-12770.

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