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Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
* Author to whom correspondence should be addressed.
Received: 6 August 2013; in revised form: 11 September 2013 / Accepted: 17 September 2013 / Published: 25 September 2013
Abstract: The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.
Keywords: ethanol sensor; zinc oxide film; heater; post-process
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Liao, W.-Z.; Dai, C.-L.; Yang, M.-Z. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors 2013, 13, 12760-12770.
Liao W-Z, Dai C-L, Yang M-Z. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors. 2013; 13(10):12760-12770.
Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi. 2013. "Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process." Sensors 13, no. 10: 12760-12770.