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Sensors 2013, 13(10), 12760-12770; doi:10.3390/s131012760
Article

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

,
*  and
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
* Author to whom correspondence should be addressed.
Received: 6 August 2013 / Revised: 11 September 2013 / Accepted: 17 September 2013 / Published: 25 September 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
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Abstract

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.
Keywords: ethanol sensor; zinc oxide film; heater; post-process ethanol sensor; zinc oxide film; heater; post-process
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Liao, W.-Z.; Dai, C.-L.; Yang, M.-Z. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process. Sensors 2013, 13, 12760-12770.

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