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Journal: Sensors, 2012
Volume: 12
Page(s): 17094-17111
17094-17111
Article: CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties
Chuang, W.-C.; Hu, Y.-C.; Chang, P.-Z.

http://www.mdpi.com/1424-8220/12/12/17094

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