Next Article in Journal
Temperature and Relative Humidity Estimation and Prediction in the Tobacco Drying Process Using Artificial Neural Networks
Next Article in Special Issue
Performance of Eudragit Coated Whispering Gallery Mode Resonator-Based Immunosensors
Previous Article in Journal
Floating Chip Mounting System Driven by Repulsive Force of Permanent Magnets for Multiple On-Site SPR Immunoassay Measurements
Previous Article in Special Issue
Italian Contributions to the Development of Continuous Glucose Monitoring Sensors for Diabetes Management
Sensors 2012, 12(10), 13985-14003; doi:10.3390/s121013985
Article

Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

1,* , 1
, 1
 and 2
Received: 6 August 2012; in revised form: 20 September 2012 / Accepted: 11 October 2012 / Published: 17 October 2012
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Italy 2012)
View Full-Text   |   Download PDF [1287 KB, uploaded 21 June 2014]   |   Browse Figures
Abstract: In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor is adopted. The capability and the accuracy of the model are assessed against three-dimensional finite element simulations, and against outcomes of experiments on instrumented samples. It is shown that the reduced order model provides accurate outcomes as for the system dynamics. To also get rather accurate results in terms of stress fields within regions that are prone to fail upon high-g shocks, a correction factor is proposed by accounting for the local stress amplification induced by re-entrant corners.
Keywords: MEMS inertial sensors; reduced order modelling; shocks and drops; polysilicon MEMS inertial sensors; reduced order modelling; shocks and drops; polysilicon
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Ghisi, A.; Mariani, S.; Corigliano, A.; Zerbini, S. Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer. Sensors 2012, 12, 13985-14003.

AMA Style

Ghisi A, Mariani S, Corigliano A, Zerbini S. Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer. Sensors. 2012; 12(10):13985-14003.

Chicago/Turabian Style

Ghisi, Aldo; Mariani, Stefano; Corigliano, Alberto; Zerbini, Sarah. 2012. "Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer." Sensors 12, no. 10: 13985-14003.


Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert