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Journal: Sensors, 2012
Volume: 12
Page(s): 13985-14003
13985-14003
Article: Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer
Ghisi, A.; Mariani, S.; Corigliano, A.; Zerbini, S.

http://www.mdpi.com/1424-8220/12/10/13985

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