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Journal: Sensors, 2011
Volume: 11
Page(s): 9798-9806
9798-9806
Article: Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
Yang, M.-Z.; Dai, C.-L.; Hong, J.-Y.

http://www.mdpi.com/1424-8220/11/10/9798

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