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Sensors 2010, 10(4), 3835-3856; doi:10.3390/s100403835

Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

* , , , ,  and
Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi’an, Shaanxi, China
* Author to whom correspondence should be addressed.
Received: 22 February 2010 / Revised: 17 March 2010 / Accepted: 6 April 2010 / Published: 14 April 2010
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)


A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/o/s and 10.8 mV/o/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/ √Hz, 0.0011 g/ √Hz, 0.314 °/s/ √Hz, and 0.008 °/s/ √Hz, respectively.
Keywords: MEMS; MIMU; bulk micromachining; gyroscope; accelerometer MEMS; MIMU; bulk micromachining; gyroscope; accelerometer
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Chang, H.; Shen, Q.; Zhou, Z.; Xie, J.; Jiang, Q.; Yuan, W. Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit. Sensors 2010, 10, 3835-3856.

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