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Sensors 2010, 10(4), 3835-3856; doi:10.3390/s100403835
Article

Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

* , , , ,  and
Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi’an, Shaanxi, China
* Author to whom correspondence should be addressed.
Received: 22 February 2010 / Revised: 17 March 2010 / Accepted: 6 April 2010 / Published: 14 April 2010
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)

Abstract

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/o/s and 10.8 mV/o/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/ √Hz, 0.0011 g/ √Hz, 0.314 °/s/ √Hz, and 0.008 °/s/ √Hz, respectively.
Keywords: MEMS; MIMU; bulk micromachining; gyroscope; accelerometer MEMS; MIMU; bulk micromachining; gyroscope; accelerometer
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Chang, H.; Shen, Q.; Zhou, Z.; Xie, J.; Jiang, Q.; Yuan, W. Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit. Sensors 2010, 10, 3835-3856.

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