Sensors 2010, 10(1), 765-774; doi:10.3390/s100100765
Article

A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method

Received: 24 November 2009; in revised form: 16 December 2009 / Accepted: 5 January 2010 / Published: 21 January 2010
(This article belongs to the Special Issue Gas Sensors 2009)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO2) pores with a diameter of 70~80 nm using this method. This thin film had a Pd/TiO2 nanoporous/SiO2/Si MIS layered structure with Pd-TiO2 as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO2 surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO2 interface work function, resulting in a change in the I-V characteristics.
Keywords: toluene; gas sensor; MIS structure; nanoimprinting method; titania; nanopore
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MDPI and ACS Style

Kim, K.-S.; Baek, W.-H.; Kim, J.-M.; Yoon, T.-S.; Lee, H.H.; Kang, C.J.; Kim, Y.-S. A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method. Sensors 2010, 10, 765-774.

AMA Style

Kim K-S, Baek W-H, Kim J-M, Yoon T-S, Lee HH, Kang CJ, Kim Y-S. A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method. Sensors. 2010; 10(1):765-774.

Chicago/Turabian Style

Kim, Kwang-Su; Baek, Woon-Hyuk; Kim, Jung-Min; Yoon, Tae-Sik; Lee, Hyun Ho; Kang, Chi Jung; Kim, Yong-Sang. 2010. "A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method." Sensors 10, no. 1: 765-774.

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