A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method
AbstractToluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO2) pores with a diameter of 70~80 nm using this method. This thin film had a Pd/TiO2 nanoporous/SiO2/Si MIS layered structure with Pd-TiO2 as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO2 surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO2 interface work function, resulting in a change in the I-V characteristics.
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Kim, K.-S.; Baek, W.-H.; Kim, J.-M.; Yoon, T.-S.; Lee, H.H.; Kang, C.J.; Kim, Y.-S. A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method. Sensors 2010, 10, 765-774.
Kim K-S, Baek W-H, Kim J-M, Yoon T-S, Lee HH, Kang CJ, Kim Y-S. A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method. Sensors. 2010; 10(1):765-774.Chicago/Turabian Style
Kim, Kwang-Su; Baek, Woon-Hyuk; Kim, Jung-Min; Yoon, Tae-Sik; Lee, Hyun Ho; Kang, Chi Jung; Kim, Yong-Sang. 2010. "A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method." Sensors 10, no. 1: 765-774.