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Sensors 2010, 10(1), 765-774; doi:10.3390/s100100765
Article

A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method

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 and
1,3,*
1 Department of Nano Science and Engineering, Myongji University, Gyeonggi 449-728, Korea 2 Department of Chemical Engineering, Myongji University, Gyeonggi 449-728, Korea 3 Department of Electrical Engineering, Myongji University, Gyeonggi 449-728, Korea
* Author to whom correspondence should be addressed.
Received: 24 November 2009 / Revised: 16 December 2009 / Accepted: 5 January 2010 / Published: 21 January 2010
(This article belongs to the Special Issue Gas Sensors 2009)
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Abstract

Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO2) pores with a diameter of 70~80 nm using this method. This thin film had a Pd/TiO2 nanoporous/SiO2/Si MIS layered structure with Pd-TiO2 as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO2 surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO2 interface work function, resulting in a change in the I-V characteristics.
Keywords: toluene; gas sensor; MIS structure; nanoimprinting method; titania; nanopore toluene; gas sensor; MIS structure; nanoimprinting method; titania; nanopore
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Kim, K.-S.; Baek, W.-H.; Kim, J.-M.; Yoon, T.-S.; Lee, H.H.; Kang, C.J.; Kim, Y.-S. A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method. Sensors 2010, 10, 765-774.

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