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Sensors 2010, 10(1), 670-683; doi:10.3390/s100100670

A Macroporous TiO2 Oxygen Sensor Fabricated Using Anodic Aluminium Oxide as an Etching Mask

1
Institute of Mechtronic Engineering, National Taipei University of Technology, Taipei 106, Taiwan
2
Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 106, Taiwan
*
Author to whom correspondence should be addressed.
Received: 10 December 2009 / Revised: 1 January 2010 / Accepted: 12 January 2010 / Published: 19 January 2010
(This article belongs to the Special Issue Metal-Oxide Based Nanosensors)
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Abstract

An innovative fabrication method to produce a macroporous Si surface by employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous and macroporous silicon surface can be effectively configured by modulating AAO process parameters and alumina film thickness, thus hopefully replacing conventional photolithography and electrochemical etch methods. The hybrid process integration is considered fully CMOS compatible thanks to the low-temperature AAO and CMOS processes. The gas-sensing characteristics of 50 nm TiO2 nanofilms deposited on the macroporous surface are compared with those of conventional plain (or non-porous) nanofilms to verify reduced response noise and improved sensitivity as a result of their macroporosity. Our experimental results reveal that macroporous geometry of the TiO2 chemoresistive gas sensor demonstrates 2-fold higher (~33%) improved sensitivity than a non-porous sensor at different levels of oxygen exposure. In addition, the macroporous device exhibits excellent discrimination capability and significantly lessened response noise at 500 °C. Experimental results indicate that the hybrid process of such miniature and macroporous devices are compatible as well as applicable to integrated next generation bio-chemical sensors. View Full-Text
Keywords: anodic aluminium oxide (AAO); macroporous; MEMS; TiO2 gas sensor anodic aluminium oxide (AAO); macroporous; MEMS; TiO2 gas sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Lu, C.-C.; Huang, Y.-S.; Huang, J.-W.; Chang, C.-K.; Wu, S.-P. A Macroporous TiO2 Oxygen Sensor Fabricated Using Anodic Aluminium Oxide as an Etching Mask. Sensors 2010, 10, 670-683.

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