Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes
AbstractThe influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), and the results indicate an increase of the grain size from 120 to 250–270 nm and film surface roughness from 4–5 to 10–12 nm when increasing the temperature from around 360–510 K. After selecting the conditions for obtaining the smallest grain size onto silicon wafer, thin Pd-Ag (0.5–2-µm thick) films were deposited onto different types of porous supports to study the influence of the porous support, layer thickness and target power on the selective layer microstructure and membrane properties. The Pd-Ag layers deposited onto ZrO2 3-nm top layer supports (smallest pore size among all tested) present high N2 permeance in the order of 10−6 mol·m−2·s−1·Pa−1 at room temperature. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Fernandez, E.; Sanchez-Garcia, J.A.; Viviente, J.L.; van Sint Annaland, M.; Gallucci, F.; Tanaka, D.A.P. Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes. Molecules 2016, 21, 210.
Fernandez E, Sanchez-Garcia JA, Viviente JL, van Sint Annaland M, Gallucci F, Tanaka DAP. Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes. Molecules. 2016; 21(2):210.Chicago/Turabian Style
Fernandez, Ekain; Sanchez-Garcia, Jose A.; Viviente, Jose L.; van Sint Annaland, Martin; Gallucci, Fausto; Tanaka, David A.P. 2016. "Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes." Molecules 21, no. 2: 210.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.