Keywordsmicromirror; Micro-Electro-Mechanical Systems (MEMS); bimorph; optimization; biomedical; desirability function; response surface models; large-aperture; micro scanning mirror; micro scanner; Ti-alloy; LiDAR; microscanner; optical scanning angle; vacuum operation; optimum pressure; curved micromirrors; three-dimensional fabrication; Gaussian beams; surface roughness; MEMS mirrors; vanadium dioxide; phase-change materials; hysteresis; dynamic model; microelectronic mechanical system (MEMS); speckle reduction; electromagnetic force; optical scanning; optical Micro Electro-Mechanical System (MEMS); Micro Optical Electro-Mechanical System (MOEMS); electrothermal actuation; torsion bar; dry photoresist; dual-reflective mirror; optical coherence tomography; MEMS scanner; axial scanning; multiphoton microscopy; electrothermal actuators; endoscopic optical-coherence tomography; microelectromechanical systems (MEMS) mirror; polysilicon; SUMMiT V; micromirror; PZT; piezoelectric; position sensors; biaxial scanning; MEMS mirror arrays; MOEMS; cryogenic testing; adaptive optics; wavefront correction; scanning micro mirror; nonlinear spring; resonant vibration; microelectromechanical systems; micro-electro-mechanical system (MEMS) mirror; bimorph; electro-thermal actuator; resonance frequency; thermal modelling; overshoot; ringing; maskless lithography; micro-optics elements; arbitrary surface; exposure dose; nonlinear effect; micromirror; input saturation; disturbance rejection; composite nonlinear feedback; integral sliding mode; n/a
