
Open Access
Reprint Book
Micro/Nano Structures and Systems
Analysis, Design, Manufacturing, and Reliability
Published: January 2023
Pages: 322
© by the authors
ISBN 978-3-0365-6545-3 (hardback); ISBN 978-3-0365-6544-6 (PDF)
https://doi.org/10.3390/books978-3-0365-6544-6 (registering DOI)
https://doi.org/10.3390/books978-3-0365-6544-6 (registering DOI)
This book is a reprint of the Special Issue
Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability
that was published in Micromachines
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