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Keywords = flexure accelerometer

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17 pages, 3584 KB  
Article
Developing an Energy-Efficient Electrostatic-Actuated Micro-Accelerometer for Low-Frequency Sensing Applications
by Umar Jamil, Muhammad Sohaib Zahid, Nouman Ghafoor, Faisal Nawaz, Jose Raul Montes-Bojorquez and Mehboob Alam
Actuators 2025, 14(9), 445; https://doi.org/10.3390/act14090445 - 8 Sep 2025
Viewed by 778
Abstract
Micro-accelerometers are in high demand across many due to their compact size, low energy consumption, and excellent precision. Since gravity causes a large movement when the device is positioned vertically, measuring low gravitational acceleration is challenging. This study examines the intrinsic relationship between [...] Read more.
Micro-accelerometers are in high demand across many due to their compact size, low energy consumption, and excellent precision. Since gravity causes a large movement when the device is positioned vertically, measuring low gravitational acceleration is challenging. This study examines the intrinsic relationship between applied voltage levels and displacement in micro-accelerometers. The study introduces a novel design that integrates hybrid flexures, comprising both linear and angular configurations, with an out-of-plane overlap varying (OPOV) electrostatic actuation mechanism. This design aims to measure the micro-accelerometer’s movement and low frequency response. The proposed device with silicon material is designed and simulated using the IntelliSuite® software, considering its small dimensions and 25 µm thickness. The norm value of 28.0916 μN from gravity’s reaction forces on the body, a resonant frequency of 179.668 Hz at the first desired mode, and a maximum stress of 24.7 MPa were obtained through the electro-mechanical analysis. A comparison of the proposed design was conducted with other configurations, measuring a frequency of 179.668 Hz at a minimum downward displacement of 7.69916 µm under the influence of gravity without electrostatic mechanisms. Following this, an electrostatic actuation mechanism was introduced to minimize displacement by applying different voltage levels, including 1 V, 1.5 V, and 3 V. At 3 V, a significant improvement in displacement reduction was observed compared to the other applied voltages. Additionally, dynamic and sensitivity analyses were carried out to validate the performance of the proposed design further. Full article
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28 pages, 3187 KB  
Article
Dynamic Calibration of Quartz Flexure Accelerometers
by Xuan Sheng, Xizhe Wang, Wenying Chen, Yang Shu and Kai Zhang
Sensors 2025, 25(16), 5096; https://doi.org/10.3390/s25165096 - 16 Aug 2025
Viewed by 508
Abstract
The dynamic behavior of quartz flexure accelerometers remains a subject of ongoing investigation, particularly in areas such as theoretical modeling, standardization, calibration methodology, and performance evaluation. To address the limitation of conventional static calibration models in accurately representing accelerometer responses under dynamic acceleration [...] Read more.
The dynamic behavior of quartz flexure accelerometers remains a subject of ongoing investigation, particularly in areas such as theoretical modeling, standardization, calibration methodology, and performance evaluation. To address the limitation of conventional static calibration models in accurately representing accelerometer responses under dynamic acceleration excitation, a dynamic calibration model is proposed. A mathematical model is first developed based on the physical mechanism of the accelerometer, characterizing its intrinsic dynamic response. Simulation-based analysis demonstrates that the proposed dynamic model offers significantly improved accuracy compared to traditional static approaches. Furthermore, a dynamic calibration method leveraging a dual-axis precision centrifuge is designed and validated. The results confirm that the proposed approach enables the precise calibration of quartz flexure accelerometers in accordance with the dynamic model. The calibration of the dynamic parameter yields a relative standard deviation of −0.048%. Full article
(This article belongs to the Section Electronic Sensors)
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19 pages, 8550 KB  
Article
An Analysis of Rock Bolt Dynamic Responses to Evaluate the Anchoring Degree of Fixation
by Alberto Godio, Claudio Oggeri and Jacopo Seccatore
Appl. Sci. 2025, 15(3), 1513; https://doi.org/10.3390/app15031513 - 2 Feb 2025
Cited by 2 | Viewed by 1539
Abstract
Rock bolting in underground environments is used for different fundamental reasons, including suspending potentially loosened blocks, clamping small wedges together, inducing a protective pressure arch along the contour of excavated voids to improve the self-supporting capacity of the ground, and providing passive pressure [...] Read more.
Rock bolting in underground environments is used for different fundamental reasons, including suspending potentially loosened blocks, clamping small wedges together, inducing a protective pressure arch along the contour of excavated voids to improve the self-supporting capacity of the ground, and providing passive pressure in integrated support systems. In this study, we describe a testing procedure that was developed to investigate the grouted annulus of a rock bolt using a low-cost investigation method. This diagnostic technique was based on the dynamic response of the system, where mechanical vibrations were induced within the rock bolt and the response was recorded by using geophones/accelerometers on the protruding element of the bolt (the collar and head). The collected signal was then processed to estimate the spectral response, and the amplitude spectrum was analyzed to detect the resonance frequencies. A 3D finite element model of the rock bolt and grouting was established to simulate the quality of the coupling by varying the mechanical properties of the grouting. The model’s response for the studied geometry of the rock bolt suggested that a poor quality of grouting was usually associated with flexural modes of vibration with a low resonance frequency. Good-quality grouting was associated with a frequency higher than 1400 Hz, where the axial vibration was mainly excited. Our analyses referred to short rock bolts, which are usually adopted in small tunnels. The interpretation of the experimental measurements assumed that the spectral response was significantly affected by the quality of the grouting, as demonstrated by the modeling procedure. The resonant frequency was compared with the results of the model simulation. The method was used to test the quality of rock bolts in a small experimental tunnel carved from andesite rock in Chile. Low-cost shock sensors (piezoelectric geophones) with low sensitivity but a wide frequency band were used. The main research outcome was the development of a reliable method to model the dynamic response of rock bolts in mines or for experimental applications in tunnels. Albeit limited to the current specific geometries, the modeling and testing will be adapted to other anchor/bolt options. Full article
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20 pages, 20631 KB  
Article
A Hybrid Method for Vibration-Based Bridge Damage Detection
by Semih Gonen and Emrah Erduran
Remote Sens. 2022, 14(23), 6054; https://doi.org/10.3390/rs14236054 - 29 Nov 2022
Cited by 21 | Viewed by 5235
Abstract
Damage detection algorithms employing the conventional acceleration measurements and the associated modal features may underperform due to the limited number of sensors used in the monitoring and the smoothing effect of spline functions used to increase the spatial resolution. The effectiveness of such [...] Read more.
Damage detection algorithms employing the conventional acceleration measurements and the associated modal features may underperform due to the limited number of sensors used in the monitoring and the smoothing effect of spline functions used to increase the spatial resolution. The effectiveness of such algorithms could be increased if a more accurate estimate of mode shapes were provided. This study presents a hybrid structural health monitoring method for vibration-based damage detection of bridge-type structures. The proposed method is based on the fusion of data from conventional accelerometers and computer vision-based measurements. The most commonly used mode shape-based damage measures, namely, the mode shape curvature method, the modal strain energy method, and the modal flexibility method, are used for damage detection. The accuracy of these parameters used together with the conventional sparse sensor setups and the proposed hybrid approach is investigated in numerical case studies, with damage scenarios simulated on a simply-supported bridge. The simulations involve measuring the acceleration response of the bridge to ambient vibrations and train crossings and then processing the data to determine the modal frequencies and mode shapes. The efficiency and accuracy of the proposed hybrid health monitoring methodology are demonstrated in case studies involving scenarios in which conventional acceleration measurements fail to detect and locate damage. The robustness of the proposed method against various levels of noise is shown as well. In the studies considered, damage as small as 10% decrease in flexural stiffness of the bridge and localized in less than 1% of the span-length of the bridge is reliably detected even with very high levels of measurement noise. Finally, a modified modal flexibility damage parameter is derived and used to alleviate the shortcomings of the modal flexibility damage parameter. Full article
(This article belongs to the Special Issue Remote Sensing in Structural Health Monitoring)
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17 pages, 7306 KB  
Article
A Novel Method for AI-Assisted INS/GNSS Navigation System Based on CNN-GRU and CKF during GNSS Outage
by Shuai Zhao, Yilan Zhou and Tengchao Huang
Remote Sens. 2022, 14(18), 4494; https://doi.org/10.3390/rs14184494 - 9 Sep 2022
Cited by 45 | Viewed by 5765
Abstract
In the fields of positioning and navigation, the integrated inertial navigation system (INS)/global navigation satellite systems (GNSS) are frequently employed. Currently, high-precision INS typically utilizes fiber optic gyroscopes (FOGs) and quartz flexural accelerometers (QFAs) rather than MEMS sensors. But when GNSS signals are [...] Read more.
In the fields of positioning and navigation, the integrated inertial navigation system (INS)/global navigation satellite systems (GNSS) are frequently employed. Currently, high-precision INS typically utilizes fiber optic gyroscopes (FOGs) and quartz flexural accelerometers (QFAs) rather than MEMS sensors. But when GNSS signals are not available, the errors of high-precision INS also disperse rapidly, similar to MEMS-INS when GNSS signals would be unavailable for a long time, leading to a serious degradation of the navigation accuracy. This paper presents a new AI-assisted method for the integrated high-precision INS/GNSS navigation system. The position increments during GNSS outage are predicted by the convolutional neural network-gated recurrent unit (CNN-GRU). In the process, the CNN is utilized to quickly extract the multi-dimensional sequence features, and GRU is used to model the time series. In addition, a new real-time training strategy is proposed for practical application scenarios, where the duration of the GNSS outage time and the motion state information of the vehicle are taken into account in the training strategy. The real road test results verify that the proposed algorithm has the advantages of high prediction accuracy and high training efficiency. Full article
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22 pages, 72487 KB  
Article
New Fiber Bragg Grating Three-Dimensional Accelerometer Based on Composite Flexure Hinges
by Hui Wang, Lei Liang, Xiongbing Zhou and Bin Tu
Sensors 2021, 21(14), 4715; https://doi.org/10.3390/s21144715 - 9 Jul 2021
Cited by 32 | Viewed by 4269
Abstract
Multi-dimensional acceleration sensors are used in important applications in the aerospace, weapon equipment, and nuclear fields and have strict requirements in terms of performance, volume, and mass. Fiber Bragg grating acceleration sensors use optical wavelength signals as a medium for information transmission to [...] Read more.
Multi-dimensional acceleration sensors are used in important applications in the aerospace, weapon equipment, and nuclear fields and have strict requirements in terms of performance, volume, and mass. Fiber Bragg grating acceleration sensors use optical wavelength signals as a medium for information transmission to effectively eliminate the influence of electromagnetic interference between multi-dimensional sensors. In this study, we designed a composite flexure hinge three-dimensional acceleration sensor. To this end, we investigated the coupling mechanism between a new integrated elastomer structure and fiber grating to determine the influence of structural parameters on the static and dynamic characteristics, volume, and mass of the sensor. By optimizing the strain distribution, amplitude, and frequency and coupling characteristics between dynamic dimensions, a design theory and a method for integrating the three-dimensional acceleration sensor were developed. The size of the optimized accelerometer is only 25 mm × 25 mm × 30 mm. Performance testing revealed that, along the three spatial dimensions, the sensor had sensitivities of 51.9, 39.5, and 20.3 pm/g, respectively, resonance frequencies of 800, 1125, and 1750 Hz, respectively, and a measurable frequency range of 0–250 Hz. Full article
(This article belongs to the Section Optical Sensors)
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16 pages, 3672 KB  
Article
Damage Indexing Method for Shear Critical Tubular Reinforced Concrete Structures Based on Crack Image Analysis
by Yuan-Sen Yang, Chia-Hao Chang and Chiun-lin Wu
Sensors 2019, 19(19), 4304; https://doi.org/10.3390/s19194304 - 4 Oct 2019
Cited by 6 | Viewed by 3301
Abstract
Image analysis techniques have been applied to measure the displacements, strain field, and crack distribution of structures in the laboratory environment, and present strong potential for use in structural health monitoring applications. Compared with accelerometers, image analysis is good at monitoring area-based responses, [...] Read more.
Image analysis techniques have been applied to measure the displacements, strain field, and crack distribution of structures in the laboratory environment, and present strong potential for use in structural health monitoring applications. Compared with accelerometers, image analysis is good at monitoring area-based responses, such as crack patterns at critical regions of reinforced concrete (RC) structures. While the quantitative relationship between cracks and structural damage depends on many factors, cracks need to be detected and quantified in an automatic manner for further investigation into structural health monitoring. This work proposes a damage-indexing method by integrating an image-based crack measurement method and a crack quantification method. The image-based crack measurement method identifies cracks locations, opening widths, and orientations. Fractal dimension analysis gives the flexural cracks and shear cracks an overall damage index ranging between 0 and 1. According to the orientations of the cracks analyzed by image analysis, the cracks can be classified as either shear or flexural, and the overall damage index can be separated into shear and flexural damage indices. These damage indices not only quantify the damage of an RC structure, but also the contents of shear and flexural failures. While the engineering significance of the damage indices is structure dependent, when the damage indexing method is used for structural health monitoring, the damage indices safety thresholds can further be defined based on the structure type under consideration. Finally, this paper demonstrates this method by using the results of two experiments on RC tubular containment vessel structures. Full article
(This article belongs to the Special Issue Optical Sensors for Structural Health Monitoring)
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17 pages, 5466 KB  
Article
The Dead Time Characterization Method of Quartz Flexure Accelerometers Using Monotonicity Number
by Bin Wu, Lingyun Ye, Tiantian Huang, Zhaowei Yang and Kaichen Song
Sensors 2019, 19(14), 3123; https://doi.org/10.3390/s19143123 - 15 Jul 2019
Cited by 2 | Viewed by 4258
Abstract
Dead time estimation is important in the design process of quartz flexure accelerometers. However, to the authors’ knowledge, the dead time existing in quartz flexure accelerometers is not well investigated in conventional identification studies. In this paper, the dead time, together with the [...] Read more.
Dead time estimation is important in the design process of quartz flexure accelerometers. However, to the authors’ knowledge, the dead time existing in quartz flexure accelerometers is not well investigated in conventional identification studies. In this paper, the dead time, together with the open-loop transfer function of quartz flexure accelerometers, is identified from step excitation experiments using two steps. Firstly, a monotonicity number was proposed to estimate the dead time. Analysis showed that the monotonicity number was robust enough to measurement noise and sensitive to step excitation. Secondly, parameters of the open-loop transfer function were identified using the least mean squares algorithm. A simulation example was applied to demonstrate the validity of the proposed method. The verified method was used to test a quartz flexure accelerometer. The experimental result shows that the dead time was 500 μs. Full article
(This article belongs to the Special Issue Gyroscopes and Accelerometers)
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10 pages, 2300 KB  
Article
Buckling-Based Non-Linear Mechanical Sensor
by Sangmin An, Bongsu Kim, Soyoung Kwon, Geol Moon, Manhee Lee and Wonho Jhe
Sensors 2018, 18(8), 2637; https://doi.org/10.3390/s18082637 - 11 Aug 2018
Cited by 6 | Viewed by 5572
Abstract
Mechanical sensors provide core keys for high-end research in quantitative understanding of fundamental phenomena and practical applications such as the force or pressure sensor, accelerometer and gyroscope. In particular, in situ sensitive and reliable detection is essential for measurements of the mechanical vibration [...] Read more.
Mechanical sensors provide core keys for high-end research in quantitative understanding of fundamental phenomena and practical applications such as the force or pressure sensor, accelerometer and gyroscope. In particular, in situ sensitive and reliable detection is essential for measurements of the mechanical vibration and displacement forces in inertial sensors or seismometers. However, enhancing sensitivity, reducing response time and equipping sensors with a measurement capability of bidirectional mechanical perturbations remains challenging. Here, we demonstrate the buckling cantilever-based non-linear dynamic mechanical sensor which addresses intrinsic limitations associated with high sensitivity, reliability and durability. The cantilever is attached on to a high-Q tuning fork and initially buckled by being pressed against a solid surface while a flexural stress is applied. Then, buckling instability occurs near the bifurcation region due to lateral movement, which allows high-sensitive detection of the lateral and perpendicular surface acoustic waves with bandwidth-limited temporal response of less than 1 ms. Full article
(This article belongs to the Special Issue Cantilever Sensor)
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9 pages, 2139 KB  
Article
Effect of Substrates on the Dynamic Properties of Inkjet-Printed Ag Thin Films
by Deokman Kim, Yunsang Kwak and Junhong Park
Appl. Sci. 2018, 8(2), 195; https://doi.org/10.3390/app8020195 - 29 Jan 2018
Cited by 4 | Viewed by 4236
Abstract
The dynamic properties of inkjet-printed Ag thin films on flexible substrates were measured using flexural wave propagation. The Ag nanoparticle suspension was inkjet-printed on polyimide (PI), silicon wafer, and glass. The effects of flexible substrates on the dynamic properties of the films were [...] Read more.
The dynamic properties of inkjet-printed Ag thin films on flexible substrates were measured using flexural wave propagation. The Ag nanoparticle suspension was inkjet-printed on polyimide (PI), silicon wafer, and glass. The effects of flexible substrates on the dynamic properties of the films were investigated. Beam-shaped Ag-printed substrates were fabricated by pico-second laser pulse cutting. The wave approach was presented to analyze the vibrations of the thin film on the substrates. The Young’s modulus and loss factor of the Ag thin films with the substrates were represented by the combined bending stiffness of the bilayer beam. The vibration response of the base-excited cantilever was measured using an accelerometer and laser Doppler vibrometer (LDV). Vibration transfers were analyzed to obtain dynamic characteristics of the Ag-printed bilayer beam. The substrate affects the reduction of the Ag thin film thickness during the sintering process and surface roughness of the film. The proposed method based on the wave approach allows measurement of the dynamic properties regardless of the ratio of the modulus between the thin film and substrate. Full article
(This article belongs to the Special Issue Printed Electronics 2017)
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14 pages, 18356 KB  
Article
A Subnano-g Electrostatic Force-Rebalanced Flexure Accelerometer for Gravity Gradient Instruments
by Shitao Yan, Yafei Xie, Mengqi Zhang, Zhongguang Deng and Liangcheng Tu
Sensors 2017, 17(11), 2669; https://doi.org/10.3390/s17112669 - 18 Nov 2017
Cited by 36 | Viewed by 8066
Abstract
A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel [...] Read more.
A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel design enables the proof mass to move exactly along the sensitive direction and exhibits a high rejection ratio at its cross-axis directions. Benefiting from large proof mass, high vacuum packaging, and air-tight sealing, the thermal Brownian noise of the accelerometer is lowered down to less than 0.2 ng / Hz with a quality factor of 15 and a natural resonant frequency of about 7.4 Hz . The accelerometer’s designed measurement range is about ±1 mg. Based on the correlation analysis between a commercial triaxial seismometer and our accelerometer, the demonstrated self-noise of our accelerometers is reduced to lower than 0.3 ng / Hz over the frequency ranging from 0.2 to 2 Hz, which meets the requirement of the rotating accelerometer gravity gradiometer. Full article
(This article belongs to the Section Physical Sensors)
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