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Nanomaterials 2017, 7(6), 126; doi:10.3390/nano7060126

Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries

1
KACST-Intel Consortium Centre of Excellence in Nano-Manufacturing and Applications (CENA), Riyadh 11442, Saudi Arabia
2
Imec, Kapeldreef 75, B-3001 Leuven, Belgium
3
Laboratoire de Chimie Analytique et D’électrochimie, Faculté des Sciences de Tunis, Université de Tunis-El-Manar, Tunis 2092, Tunisie
4
KU Leuven, Centre for Surface Chemistry and Catalysis, Faculty of Bioscience Engineering, Kasteelpark Arenberg 23 bus 2461, B-3001 Leuven, Belgium
*
Author to whom correspondence should be addressed.
Academic Editor: Guanying Chen
Received: 5 April 2017 / Revised: 9 May 2017 / Accepted: 22 May 2017 / Published: 27 May 2017
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Abstract

In this work, we present the electrochemical deposition of manganese dioxide (MnO2) thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD), is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO2 (EMD) coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li+ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications. View Full-Text
Keywords: electrodeposition; EMD; thin film; carbon; 3D current collector; microbatteries electrodeposition; EMD; thin film; carbon; 3D current collector; microbatteries
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zargouni, Y.; Deheryan, S.; Radisic, A.; Alouani, K.; Vereecken, P.M. Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries. Nanomaterials 2017, 7, 126.

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