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Nanomaterials 2016, 6(9), 162; doi:10.3390/nano6090162

The Effect of Viscous Air Damping on an Optically Actuated Multilayer MoS2 Nanomechanical Resonator Using Fabry-Perot Interference

School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China
Science and Technology on Metrology and Calibration Laboratory, Beijing 100095, China
Author to whom correspondence should be addressed.
Academic Editor: Ho Won Jang
Received: 14 July 2016 / Revised: 23 August 2016 / Accepted: 30 August 2016 / Published: 5 September 2016
(This article belongs to the Special Issue 2D Nanomaterials: Graphene and Beyond Graphene)
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We demonstrated a multilayer molybdenum disulfide (MoS2) nanomechanical resonator by using optical Fabry-Perot (F-P) interferometric excitation and detection. The thin circular MoS2 nanomembrane with an approximate 8-nm thickness was transferred onto the endface of a ferrule with an inner diameter of 125 μm, which created a low finesse F-P interferometer with a cavity length of 39.92 μm. The effects of temperature and viscous air damping on resonance behavior of the resonator were investigated in the range of −10–80 °C. Along with the optomechanical behavior of the resonator in air, the measured resonance frequencies ranged from 36 kHz to 73 kHz with an extremely low inflection point at 20 °C, which conformed reasonably to those solved by previously obtained thermal expansion coefficients of MoS2. Further, a maximum quality (Q) factor of 1.35 for the resonator was observed at 0 °C due to viscous dissipation, in relation to the lower Knudsen number of 0.0025~0.0034 in the tested temperature range. Moreover, measurements of Q factor revealed little dependence of Q on resonance frequency and temperature. These measurements shed light on the mechanisms behind viscous air damping in MoS2, graphene, and other 2D resonators. View Full-Text
Keywords: multilayer MoS2 diaphragm; resonator; viscous air damping; Fabry-Perot interference multilayer MoS2 diaphragm; resonator; viscous air damping; Fabry-Perot interference

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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She, Y.; Li, C.; Lan, T.; Peng, X.; Liu, Q.; Fan, S. The Effect of Viscous Air Damping on an Optically Actuated Multilayer MoS2 Nanomechanical Resonator Using Fabry-Perot Interference. Nanomaterials 2016, 6, 162.

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