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Appl. Sci. 2016, 6(9), 250; doi:10.3390/app6090250

Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces

1
Instituto de Ciencia Molecular, Universitat de València, Calle Catedrático José Beltran, 2, Paterna, Valencia 46980, Spain
2
Unité Mixte de Physique CNRS/Thales, Univ. Paris-Sud, Université Paris-Saclay, Palaiseau 91767, France
*
Authors to whom correspondence should be addressed.
Academic Editor: Andres Castellanos-Gomez
Received: 27 July 2016 / Revised: 25 August 2016 / Accepted: 29 August 2016 / Published: 8 September 2016
(This article belongs to the Special Issue Two-Dimensional Transition Metal Dichalcogenides)
View Full-Text   |   Download PDF [4619 KB, uploaded 8 September 2016]   |  

Abstract

The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Metal Dichalcogenides (TMDCs). We show the results of a systematic study of the parameters that affect the LON process as well as the use of two different modes of lithographic operation: dynamic and static. The application of this kind of lithography in different types of TMDCs demonstrates the versatility of the LON for the creation of accurate and reproducible nanopatterns in exfoliated 2D-crystals and reveals the influence of the chemical composition and crystalline structure of the systems on the morphology of the resultant oxide motifs. View Full-Text
Keywords: transition metal dichalcogenides; local oxidation nanolithography; atomic force microscope; local anodic oxidation; oxidation scanning probe lithography transition metal dichalcogenides; local oxidation nanolithography; atomic force microscope; local anodic oxidation; oxidation scanning probe lithography
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Pinilla-Cienfuegos, E.; Mañas-Valero, S.; Navarro-Moratalla, E.; Tatay, S.; Forment-Aliaga, A.; Coronado, E. Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces. Appl. Sci. 2016, 6, 250.

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