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Micromachines 2018, 9(9), 456; https://doi.org/10.3390/mi9090456

Electrohydrodynamic Direct-Writing Micropatterns with Assisted Airflow

1
Department of Instrumental and Electrical Engineering, Xiamen University, Xiamen 361102, China
2
School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China
*
Author to whom correspondence should be addressed.
Received: 31 July 2018 / Revised: 6 September 2018 / Accepted: 10 September 2018 / Published: 11 September 2018
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology)
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Abstract

Electrohydrodynamic direct-writing (EDW) is a developing technology for high-resolution printing. How to decrease the line width and improve the deposition accuracy of direct-written patterns has been the key to the promotion for the further application of EDW. In this paper, an airflow-assisted spinneret for electrohydrodynamic direct-writing was designed. An assisted laminar airflow was introduced to the EDW process, which provided an additional stretching and constraining force on the jet to reduce the surrounding interferences and enhance jet stability. The flow field and the electric field around the spinneret were simulated to direct the structure design of the airflow-assisted spinneret. Then, a series of experiments were conducted, and the results verified the spinneret design and demonstrated a stable ejection of jet in the EDW process. With assisted airflow, the uniformity of printed patterns and the deposition position accuracy of a charged jet can be improved. Complex patterns with positioning errors of less than 5% have been printed and characterized, which provide an effective way to promote the integration of micro/nanosystems. View Full-Text
Keywords: electrohydrodynamic direct-writing; assisted airflow; jet stability; deposition accuracy electrohydrodynamic direct-writing; assisted airflow; jet stability; deposition accuracy
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Jiang, J.; Wang, X.; Li, W.; Liu, J.; Liu, Y.; Zheng, G. Electrohydrodynamic Direct-Writing Micropatterns with Assisted Airflow. Micromachines 2018, 9, 456.

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