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Micromachines 2018, 9(9), 454; https://doi.org/10.3390/mi9090454

Design, Simulation and Experimental Study of the Linear Magnetic Microactuator

1
College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China
2
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
*
Author to whom correspondence should be addressed.
Received: 3 August 2018 / Revised: 28 August 2018 / Accepted: 6 September 2018 / Published: 11 September 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
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Abstract

This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis. View Full-Text
Keywords: MEMS; microactuator; magnetic MEMS; microactuator; magnetic
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Feng, H.; Miao, X.; Yang, Z. Design, Simulation and Experimental Study of the Linear Magnetic Microactuator. Micromachines 2018, 9, 454.

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