A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function
Abstract
:1. Introduction
2. System Description and Topology Analysis
2.1. Sensing Element
2.2. Electrostatic Feedback Force
- Nonlinearity: the electrostatic force is second-order related to voltage, and is modulated by the displacement x.
2.3. ΣΔ Closed-Loop Interface
2.3.1. Performance
2.3.2. Stability
3. BIST Function
4. Circuit Implementation Details
5. Results and Discussion
6. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Chen, D.; Liu, X.; Yin, L.; Wang, Y.; Shi, Z.; Zhang, G. A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function. Micromachines 2018, 9, 444. https://doi.org/10.3390/mi9090444
Chen D, Liu X, Yin L, Wang Y, Shi Z, Zhang G. A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function. Micromachines. 2018; 9(9):444. https://doi.org/10.3390/mi9090444
Chicago/Turabian StyleChen, Dongliang, Xiaowei Liu, Liang Yin, Yinhang Wang, Zhaohe Shi, and Guorui Zhang. 2018. "A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function" Micromachines 9, no. 9: 444. https://doi.org/10.3390/mi9090444