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Journal: Micromachines, 2018
Volume: 9
Number: 422

Article: Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
Authors: by Jessica Ortigoza-Diaz, Kee Scholten, Christopher Larson, Angelica Cobo, Trevor Hudson, James Yoo, Alex Baldwin, Ahuva Weltman Hirschberg and Ellis Meng
Link: https://www.mdpi.com/2072-666X/9/9/422

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