The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing
Abstract
:1. Introduction
2. Materials and Methods
3. Results
3.1. Microstructure of UFG LZ91 Mg-Li Alloy
3.2. Micro-Embossing Process on UFG LZ91 Mg-Li Alloy
3.3. Surface Topography of the Embossed Micro-Channels
4. Discussions
4.1. Formability of Micro-Embossing at Elevated Temperatures for UFG LZ91 Mg-Li Alloy
4.2. The Potential Applications of UFG Mg-Li Alloy in Fabrication of MEMS Components
5. Conclusions
- (1)
- Micro-embossing processes are performed on the UFG LZ91 Mg-Li alloy processed by HPT by metal die, and the micro-array channels with widths ranging from 50 μm to 200 μm are fabricated under an applied force of 2 kN with a temperature of 423 K followed by a dwell time of 60 s. The results indicate that embossed micro-channels with all widths were clearly embossed well, with an excellent geometrical transferability without obvious disfigurement, and filled completely.
- (2)
- Micro-embossing of the CG LZ91 Mg-Li alloy produces micro-array channels that are 100 μm in width and are uneven with wrinkles, but the micro-embossing of the UFG LZ91 Mg-Li alloy at the same temperature produces smooth micro-channels. The patterns on the metal mold are fully transferred to the UFG LZ91 Mg-Li alloy plate.
- (3)
- Micro-embossing of UFG LZ91 Mg-Li alloy has good potential applications in mass fabrication of MEMS components. In the future, UFG materials with much finer grains will be used to fabricate much smaller channels.
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Channel Width w | Channel Depth ho | Filling Height h |
---|---|---|
50 | 50 | ~50 |
100 | 100 | ~100 |
150 | 150 | ~150 |
200 | 200 | ~200 |
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Su, Q.; Xu, J.; Wang, C.; Shan, D.; Guo, B. The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing. Micromachines 2018, 9, 55. https://doi.org/10.3390/mi9020055
Su Q, Xu J, Wang C, Shan D, Guo B. The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing. Micromachines. 2018; 9(2):55. https://doi.org/10.3390/mi9020055
Chicago/Turabian StyleSu, Qian, Jie Xu, Chenxi Wang, Debin Shan, and Bin Guo. 2018. "The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing" Micromachines 9, no. 2: 55. https://doi.org/10.3390/mi9020055