A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects
Abstract
:1. Introduction
2. Concept Discussion
2.1. Requirements
2.2. Design
3. Experiment
4. Results and Discussions
4.1. Fabrication of Test Device
4.2. Fabrication Challenges
4.3. Test Setup and Mounting
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Savov, A.; Joshi, S.; Shafqat, S.; Hoefnagels, J.; Louwerse, M.; Stoute, R.; Dekker, R. A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects. Micromachines 2018, 9, 39. https://doi.org/10.3390/mi9010039
Savov A, Joshi S, Shafqat S, Hoefnagels J, Louwerse M, Stoute R, Dekker R. A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects. Micromachines. 2018; 9(1):39. https://doi.org/10.3390/mi9010039
Chicago/Turabian StyleSavov, Angel, Shivani Joshi, Salman Shafqat, Johan Hoefnagels, Marcus Louwerse, Ronald Stoute, and Ronald Dekker. 2018. "A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects" Micromachines 9, no. 1: 39. https://doi.org/10.3390/mi9010039