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Micromachines 2018, 9(1), 19; https://doi.org/10.3390/mi9010019

A Paper-Based Piezoelectric Accelerometer

1
Department of Mechanical Engineering, McGill University, Montreal, QC H3A 0G4, Canada
2
Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada
3
Current address: Department of Chemistry, Stanford University, Stanford, CA 94305, USA
4
Research Center of Robotics and Micro System & Collaborative Innovation Center of Suzhou NanoScience and Technology, Soochow University, Suzhou 215021, China
*
Author to whom correspondence should be addressed.
Received: 11 November 2017 / Revised: 26 December 2017 / Accepted: 30 December 2017 / Published: 2 January 2018
(This article belongs to the Special Issue Paper-Based Transducers and Electronics)
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Abstract

This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel beams, serving as the strain sensing element for acceleration measurement. The electric charges produced from the ZnO-NW-coated paper are converted into a voltage output using a custom-made charge amplifier circuit. The device fabrication only involves cutting of paper and hydrothermal growth of ZnO NWs, and does not require the access to expensive and sophisticated equipment. The performance of the devices with different weight growth percentages of the ZnO NWs was characterized. View Full-Text
Keywords: paper-based sensors; microelectromechanical systems (MEMS); piezoelectric accelerometer; hydrothermal growth; zinc oxide nanowires paper-based sensors; microelectromechanical systems (MEMS); piezoelectric accelerometer; hydrothermal growth; zinc oxide nanowires
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Wang, Y.-H.; Song, P.; Li, X.; Ru, C.; Ferrari, G.; Balasubramanian, P.; Amabili, M.; Sun, Y.; Liu, X. A Paper-Based Piezoelectric Accelerometer. Micromachines 2018, 9, 19.

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