A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil
Abstract
:1. Introduction
2. Chip Design and Fabrication
3. Detection Mode
3.1. Inductance Detection Mode
3.2. Capacitance Detection Mode
4. Experiments and Discussion
4.1. Sample Preparations
4.2. Inductance Detection Experiments
4.3. Capacitance Detection Experiments
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Parameters | N = 20 | N = 30 | N = 40 | N = 50 | N = 60 |
---|---|---|---|---|---|
L (μH) | 1.4030 | 2.8435 | 5.3643 | 9.5557 | 15.8967 |
Leq (μH) | 1.1037 | 2.5144 | 5.0266 | 9.0852 | 15.4097 |
M (μH) | 0.8044 | 2.1835 | 4.6889 | 8.6147 | 14.9227 |
M/L | 0.5733 | 0.7679 | 0.8741 | 0.9015 | 0.9387 |
Iron Particle Sizes (μm) | Average Amplitude (H) | Copper particle Sizes (μm) | Average Amplitude (H) |
---|---|---|---|
40 to 50 | 4.4 × 10−11 | 110 to 120 | 3.8 × 10−11 |
70 to 80 | 8.7 × 10−11 | 120 to 130 | 4. 1× 10−11 |
100 to 110 | 4.04 × 10−10 | 140 to 150 | 5.9 × 10−11 |
Water Droplet Sizes (μm) | Average Amplitude (H) | Bubble Sizes (μm) | Average Amplitude (H) |
---|---|---|---|
100 to 110 | 2.1 × 10−16 | 180 to 200 | 1.9 × 10−16 |
190 to 200 | 1.02 × 10−15 | 260 to 280 | 7.7 × 10−16 |
210 to 120 | 1.23 × 10−15 | 280 to 300 | 9.6 × 10−16 |
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Zhang, H.; Zeng, L.; Teng, H.; Zhang, X. A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil. Micromachines 2017, 8, 249. https://doi.org/10.3390/mi8080249
Zhang H, Zeng L, Teng H, Zhang X. A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil. Micromachines. 2017; 8(8):249. https://doi.org/10.3390/mi8080249
Chicago/Turabian StyleZhang, Hongpeng, Lin Zeng, Huaibo Teng, and Xingming Zhang. 2017. "A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil" Micromachines 8, no. 8: 249. https://doi.org/10.3390/mi8080249