Next Article in Journal
Web-Based Remote Control of a Building’s Electrical Power, Green Power Generation and Environmental System Using a Distributive Microcontroller
Previous Article in Journal
Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification
Previous Article in Special Issue
Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
Article Menu
Issue 8 (August) cover image

Export Article

Open AccessArticle
Micromachines 2017, 8(8), 240; doi:10.3390/mi8080240

Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity

Department of Finemechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan
*
Author to whom correspondence should be addressed.
Received: 1 July 2017 / Revised: 29 July 2017 / Accepted: 1 August 2017 / Published: 4 August 2017
(This article belongs to the Special Issue MEMS Mirrors)
View Full-Text   |   Download PDF [3200 KB, uploaded 4 August 2017]   |  

Abstract

A scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-spring effect of the torsion-bar spring generates several problems, such as hysteresis, frequency shift, and instability by oscillation jump. In this paper, a scanning micro-mirror with an electrostatic-comb spring is studied for compensation of the hard-spring effect of the torsion-bar spring. The hard-spring effect of the torsion-bar spring is compensated with the equivalent soft-spring effect of the electrostatic-comb spring. The oscillation curve becomes symmetric at the resonant frequency although the resonant frequency increases. Theoretical analysis is given for roughly explaining the compensation. A 0.5 mm square scanning micro-mirror having two kinds of combs, i.e., an actuator comb and a compensation comb, is fabricated from a silicon-on-insulator wafer for testing the compensation of the hard-spring in a vacuum and in atmospheric air. The bending of the oscillation curve is compensated by applying a DC voltage to the electrostatic-comb spring in vacuum and atmosphere. The compensation is attributed by theoretical approach to the soft-spring effect of the electrostatic-comb spring. View Full-Text
Keywords: scanning micro mirror; nonlinear spring; resonant vibration; microelectromechanical systems scanning micro mirror; nonlinear spring; resonant vibration; microelectromechanical systems
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Izawa, T.; Sasaki, T.; Hane, K. Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity. Micromachines 2017, 8, 240.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top