Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity
AbstractA scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-spring effect of the torsion-bar spring generates several problems, such as hysteresis, frequency shift, and instability by oscillation jump. In this paper, a scanning micro-mirror with an electrostatic-comb spring is studied for compensation of the hard-spring effect of the torsion-bar spring. The hard-spring effect of the torsion-bar spring is compensated with the equivalent soft-spring effect of the electrostatic-comb spring. The oscillation curve becomes symmetric at the resonant frequency although the resonant frequency increases. Theoretical analysis is given for roughly explaining the compensation. A 0.5 mm square scanning micro-mirror having two kinds of combs, i.e., an actuator comb and a compensation comb, is fabricated from a silicon-on-insulator wafer for testing the compensation of the hard-spring in a vacuum and in atmospheric air. The bending of the oscillation curve is compensated by applying a DC voltage to the electrostatic-comb spring in vacuum and atmosphere. The compensation is attributed by theoretical approach to the soft-spring effect of the electrostatic-comb spring. View Full-Text
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Izawa, T.; Sasaki, T.; Hane, K. Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity. Micromachines 2017, 8, 240.
Izawa T, Sasaki T, Hane K. Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity. Micromachines. 2017; 8(8):240.Chicago/Turabian Style
Izawa, Takashi; Sasaki, Takashi; Hane, Kazuhiro. 2017. "Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity." Micromachines 8, no. 8: 240.
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