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Micromachines 2017, 8(8), 238; doi:10.3390/mi8080238

Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification

1
School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou 221116, China
2
Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton 3800, Australia
*
Author to whom correspondence should be addressed.
Received: 12 July 2017 / Revised: 27 July 2017 / Accepted: 27 July 2017 / Published: 3 August 2017
(This article belongs to the Special Issue Piezoelectric MEMS)
View Full-Text   |   Download PDF [5310 KB, uploaded 3 August 2017]   |  

Abstract

Compliant bridge mechanisms are frequently utilized to scale micrometer order motions of piezoelectric actuators to levels suitable for desired applications. Analytical equations have previously been specifically developed for two configurations of bridge mechanisms: parallel and rhombic type. Based on elastic beam theory, a kinematic analysis of compliant bridge mechanisms in general configurations is presented. General equations of input displacement, output displacement, displacement amplification, input stiffness, output stiffness and stress are presented. Using the established equations, a piezo-driven compliant bridge mechanism has been optimized to maximize displacement amplification. The presented equations were verified using both computational finite element analysis and through experimentation. Finally, comparison with previous studies further validates the versatility and accuracy of the proposed models. The formulations of the new analytical method are simplified and efficient, which help to achieve sufficient estimation and optimization of compliant bridge mechanisms for nano-positioning systems. View Full-Text
Keywords: flexure hinge; compliant bridge mechanisms; micro-motion scaling; kinematics flexure hinge; compliant bridge mechanisms; micro-motion scaling; kinematics
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Wei, H.; Shirinzadeh, B.; Li, W.; Clark, L.; Pinskier, J.; Wang, Y. Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification. Micromachines 2017, 8, 238.

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