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Micromachines 2017, 8(6), 194; doi:10.3390/mi8060194

Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

1
School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore
2
Singapore Center of 3D Printing, Nanyang Technological University, Singapore 639798, Singapore
*
Author to whom correspondence should be addressed.
Academic Editor: Hongrui Jiang
Received: 21 March 2017 / Revised: 23 May 2017 / Accepted: 7 June 2017 / Published: 21 June 2017
(This article belongs to the Special Issue Bioprinting and 3D Printing in MEMS Technology)
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Abstract

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient monitoring. This paper presents the latest review of a few successful cases of printable MEMS devices. This review shows that inkjet printing is good for printing two-dimensional or surface MEMS devices from a small unit to an array over a large area. In the future, three-dimensional printing of multi-materials, from metal, plastic, to ceramic, will open the possibility of realizing more variety and function of a large-areal MEMS array, for a mobile electro-mechanical systems. View Full-Text
Keywords: inkjet printing; micro-electro-mechanical systems; sensors; actuators inkjet printing; micro-electro-mechanical systems; sensors; actuators
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Lau, G.-K.; Shrestha, M. Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS). Micromachines 2017, 8, 194.

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