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Micromachines 2017, 8(3), 82; doi:10.3390/mi8030082

Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator

1
and
1,2,*
1
Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, E11, Taipa, Macao 999078, China
2
Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong 999077, China
*
Author to whom correspondence should be addressed.
Academic Editors: Duc Truong Pham and Nam-Trung Nguyen
Received: 12 December 2016 / Revised: 6 February 2017 / Accepted: 22 February 2017 / Published: 6 March 2017
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Abstract

With the development of nanotechnology that contains automatic control, precision machinery and precise measurement, etc., micro/nano manipulation has become a new research direction in recent years. This paper presents the design and analysis procedures of a new high precision XY decoupled compact parallel micromanipulator (DCPM) for micro scale positioning applications. The DCPM is made up of the decoupler, two-stage amplifier and the piezoelectric translator (PZT) actuators, which utilizes the characteristics of flexure hinges. In this paper, firstly, a new two-stage bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers in order to increase the ratio of amplification. It is pivotal for designing the micromanipulator. Then, the kinematic modeling of the micromanipulator is carried out by resorting to stiffness and compliance analysis via matrix method. Finally, the performance of the micromanipulator is validated by finite-element analysis (FEA) which is preliminary job for fabricating the prototype and designing the control system of the XY stage that is expected to be adopted into micro/nano manipulations. View Full-Text
Keywords: high precision; two-stage amplifier; decouple; kinematic analysis; flexure mechanism design; micro/nano parallel robots; finite-element analysis (FEA) simulation high precision; two-stage amplifier; decouple; kinematic analysis; flexure mechanism design; micro/nano parallel robots; finite-element analysis (FEA) simulation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Chen, X.; Li, Y. Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator. Micromachines 2017, 8, 82.

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