Next Article in Journal
A Review on Macroscale and Microscale Cell Lysis Methods
Previous Article in Journal
Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator
Article Menu
Issue 3 (March) cover image

Export Article

Open AccessArticle
Micromachines 2017, 8(3), 77; doi:10.3390/mi8030077

Design and Fabrication of a Slanted-Beam MEMS Accelerometer

Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China
*
Author to whom correspondence should be addressed.
Academic Editor: Ha Duong Ngo
Received: 17 January 2017 / Revised: 20 February 2017 / Accepted: 28 February 2017 / Published: 7 March 2017
View Full-Text   |   Download PDF [7861 KB, uploaded 7 March 2017]   |  

Abstract

This paper presents a novel capacitive microelectromechanical systems (MEMS) accelerometer with slanted supporting beams and all-silicon sandwich structure. Its sensing mechanism is quite similar to an ordinary sandwich-type MEMS accelerometer, except that its proof mass is suspended by a beam parallel to the {111} plane of a (100) silicon wafer. In this way, each sensing element can detect accelerations in two orthogonal directions. Four of these sensing elements could work together and constitute a 3-axis micro-accelerometer by using a simple planar assembly process. This design avoids the traditional 3-axis accelerometer’ disadvantage of possible placement inaccuracy when assembling on three different planes and largely reduces the package volume. The slanted-beam accelerometer’s performance was modeled and analyzed by using both analytical calculations and finite element method (FEM) simulations. A prototype of one sensing element was fabricated and tested. Measured results show that this accelerometer has a good bias stability 76.8 ppm (1σ, tested immediately after power on), two directional sensitivities (sensitivity angle α = 45.4°) and low nonlinearity (<0.5%) over a sensing range up to ±50 g, which demonstrates a great opportunity for future high-precision three-axis inertial measurement. View Full-Text
Keywords: MEMS; accelerometer; slanted beam; all-silicon; sandwich structure MEMS; accelerometer; slanted beam; all-silicon; sandwich structure
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Xu, W.; Yang, J.; Xie, G.; Wang, B.; Qu, M.; Wang, X.; Liu, X.; Tang, B. Design and Fabrication of a Slanted-Beam MEMS Accelerometer. Micromachines 2017, 8, 77.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top