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Micromachines 2017, 8(2), 59; doi:10.3390/mi8020059

Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications

1
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
2
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
Academic Editors: Roberto Osellame and Rebeca Martínez Vázquez
Received: 21 December 2016 / Revised: 8 February 2017 / Accepted: 9 February 2017 / Published: 16 February 2017
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
View Full-Text   |   Download PDF [6173 KB, uploaded 16 February 2017]   |  

Abstract

Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of ~1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective. View Full-Text
Keywords: internal processing; femtosecond laser; silicate glass; microfluidics; nanofluidics; lab-on-a-chip internal processing; femtosecond laser; silicate glass; microfluidics; nanofluidics; lab-on-a-chip
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Cheng, Y. Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications. Micromachines 2017, 8, 59.

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