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Micromachines 2017, 8(10), 313; https://doi.org/10.3390/mi8100313

Transparent Ferroelectric Capacitors on Glass

Luxembourg Institute of Science and Technology, Department of Materials Research and Technology, 41 rue du Brill, Belvaux, L-4422, Luxembourg
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Received: 6 September 2017 / Revised: 8 October 2017 / Accepted: 17 October 2017 / Published: 20 October 2017
(This article belongs to the Special Issue Piezoelectric MEMS)
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Abstract

We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer layer on the fused silica substrate, are highly transparent (>60% in the visible optical range). Fully crystallized Pb(Zr0.52Ti0.48)O3 (PZT) films are dielectrically functional and exhibit a typical ferroelectric polarization loop with a remanent polarization of 15 μC/cm2. The permittivity value of 650, obtained with IDE AZO electrodes is equivalent to the one measured with Pt electrodes patterned with the same design, which proves the high quality of the developed transparent structures. View Full-Text
Keywords: transparent piezoelectrics; glass substrate; chemical solution deposition transparent piezoelectrics; glass substrate; chemical solution deposition
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Sette, D.; Girod, S.; Leturcq, R.; Glinsek, S.; Defay, E. Transparent Ferroelectric Capacitors on Glass. Micromachines 2017, 8, 313.

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