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Micromachines 2017, 8(10), 293; doi:10.3390/mi8100293

Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct

1
Saginomiya Seisakusho, Inc., 535 Sasai, Sayama, Saitama 350-1395, Japan
2
Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
3
Department of Mechanical Engineering, Shizuoka University, 3-5-1 Jyouhoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Received: 11 August 2017 / Revised: 8 September 2017 / Accepted: 14 September 2017 / Published: 28 September 2017
(This article belongs to the Special Issue MEMS Energy Harvesters)
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Abstract

We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100 μ W RMS of (root-mean-square) output electric power under 0.03 G RMS (G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by electrothermal polarization in silicon oxide using potassium ions. The force factor, which is defined by a proportional coefficient of the output current with respect to the vibration velocity, is 2.34 × 10 4 C/m; this large value allows the developed vibration power generator to have a very high power efficiency of 80.7%. We have also demonstrated a charging experiment by using an environmental acceleration waveform with an average amplitude of about 0.03 G RMS taken at a viaduct of a highway, and we obtained 4.8 mJ of electric energy stored in a 44 μ F capacitor in 90 min. View Full-Text
Keywords: electrostatic energy harvester; electret; potassium ion electret; comb-drive electrostatic energy harvester; electret; potassium ion electret; comb-drive
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Koga, H.; Mitsuya, H.; Honma, H.; Fujita, H.; Toshiyoshi, H.; Hashiguchi, G. Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct. Micromachines 2017, 8, 293.

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