Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct
Saginomiya Seisakusho, Inc., 535 Sasai, Sayama, Saitama 350-1395, Japan
Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Department of Mechanical Engineering, Shizuoka University, 3-5-1 Jyouhoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 11 August 2017 / Revised: 8 September 2017 / Accepted: 14 September 2017 / Published: 28 September 2017
We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100
of (root-mean-square) output electric power under 0.03 G
(G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by electrothermal polarization in silicon oxide using potassium ions. The force factor, which is defined by a proportional coefficient of the output current with respect to the vibration velocity, is 2.34 × 10
C/m; this large value allows the developed vibration power generator to have a very high power efficiency of 80.7%. We have also demonstrated a charging experiment by using an environmental acceleration waveform with an average amplitude of about 0.03 G
taken at a viaduct of a highway, and we obtained 4.8 mJ of electric energy stored in a 44
F capacitor in 90 min.
This is an open access article distributed under the Creative Commons Attribution License
which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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MDPI and ACS Style
Koga, H.; Mitsuya, H.; Honma, H.; Fujita, H.; Toshiyoshi, H.; Hashiguchi, G. Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct. Micromachines 2017, 8, 293.
Koga H, Mitsuya H, Honma H, Fujita H, Toshiyoshi H, Hashiguchi G. Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct. Micromachines. 2017; 8(10):293.
Koga, Hideaki; Mitsuya, Hiroyuki; Honma, Hiroaki; Fujita, Hiroyuki; Toshiyoshi, Hiroshi; Hashiguchi, Gen. 2017. "Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct." Micromachines 8, no. 10: 293.
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