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Micromachines 2017, 8(1), 14; doi:10.3390/mi8010014

Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

1
Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
2
Computer, Electrical and Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
*
Author to whom correspondence should be addressed.
Academic Editor: Hiroshi Toshiyoshi
Received: 8 November 2016 / Revised: 21 December 2016 / Accepted: 27 December 2016 / Published: 4 January 2017
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Abstract

We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them. View Full-Text
Keywords: microresonators; clamped–guided arch beams; bi-directional electrostatic actuator microresonators; clamped–guided arch beams; bi-directional electrostatic actuator
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Alcheikh, N.; Ramini, A.; Hafiz, M.A.A.; Younis, M.I. Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads. Micromachines 2017, 8, 14.

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