Large-Scale Integration of All-Glass Valves on a Microfluidic Device
AbstractIn this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz. View Full-Text
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Yalikun, Y.; Tanaka, Y. Large-Scale Integration of All-Glass Valves on a Microfluidic Device. Micromachines 2016, 7, 83.
Yalikun Y, Tanaka Y. Large-Scale Integration of All-Glass Valves on a Microfluidic Device. Micromachines. 2016; 7(5):83.Chicago/Turabian Style
Yalikun, Yaxiaer; Tanaka, Yo. 2016. "Large-Scale Integration of All-Glass Valves on a Microfluidic Device." Micromachines 7, no. 5: 83.