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Micromachines 2016, 7(4), 62; doi:10.3390/mi7040062

Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment

1
Laboratoire Electronique, Systèmes de Communication et Microsystèmes, Université Paris-Est, ESIEE Paris, ESYCOM EA 2552, 93162 Noisy-le-Grand, France
2
Center for Nanotechnology, Zewail City of Science and Technology, Sheikh Zayed District, 6th of October City, 12588 Giza, Egypt
3
Electronics and Electrical Communication Engineering, Faculty of Engineering, Ain-Shams University, 1 Elsarayat St., Abbassia, Cairo 11517, Egypt
*
Author to whom correspondence should be addressed.
Academic Editors: Shih-Kang Fan, Da-Jeng Yao and Yi-Chung Tung
Received: 28 February 2016 / Revised: 29 March 2016 / Accepted: 1 April 2016 / Published: 7 April 2016
(This article belongs to the Special Issue Optofluidics 2015)
View Full-Text   |   Download PDF [6669 KB, uploaded 7 April 2016]   |  

Abstract

In the scope of miniaturized optical sensors for liquid refractometry, this work details the design, numerical simulation, and experimental characterization of a Fabry-Pérot resonator consisting of two deeply-etched silicon cylindrical mirrors with a micro-tube in between holding the liquid analyte under study. The curved surfaces of the tube and the cylindrical mirrors provide three-dimensional light confinement and enable achieving stability for the cavity illuminated by a Gaussian beam input. The resonant optofluidic cavity attains a high-quality factor (Q)—over 2800—which is necessary for a sensitive refractometer, not only by providing a sharp interference spectrum peak that enables accurate tracing of the peak wavelengths shifts, but also by providing steep side peaks, which enables detection of refractive index changes by power level variations when operating at a fixed wavelength. The latter method can achieve refractometry without the need for spectroscopy tools, provided certain criteria explained in the details are met. By experimentally measuring mixtures of acetone-toluene with different ratios, refractive index variations of 0.0005 < Δn < 0.0022 could be detected, with sensitivity as high as 5500 μW/RIU. View Full-Text
Keywords: Fabry-Pérot cavity; optical resonator; optofluidic sensor; on-chip refractometer; refractive index measurement; lab-on-a-chip Fabry-Pérot cavity; optical resonator; optofluidic sensor; on-chip refractometer; refractive index measurement; lab-on-a-chip
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Gaber, N.; Sabry, Y.M.; Marty, F.; Bourouina, T. Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment. Micromachines 2016, 7, 62.

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