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Micromachines 2016, 7(12), 230; doi:10.3390/mi7120230

A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device

1
Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing 210096, China
2
Nanomedicine Research Lab CLINAM, University Hospital Basel, Bernoullistrassse 20, Basel CH-4056, Switzerland
3
Department of Chemical Engineering, Queen’s University, 9 Division St., Kingston, ON K7L 3N6, Canada
*
Author to whom correspondence should be addressed.
Academic Editors: Wei Wang, Chia-Hung Chen and Zhigang Wu
Received: 20 September 2016 / Revised: 5 December 2016 / Accepted: 7 December 2016 / Published: 14 December 2016
(This article belongs to the Special Issue Optofluidics 2016)
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Abstract

This paper reports a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8. The method is based on epoxide opening and dehydration reactions between surface-modified PDMS and SU-8. A PDMS replica is first activated via the low-cost lab equipment, i.e., the oxygen plasma cleaner or the corona treater. Then both SU-8 and plasma-treated PDMS samples are functionalized using hydrolyzed (3-aminopropyl)triethoxysilane (APTES). Ultimately, the samples are simply brought into contact and heated to enable covalent bonding. The molecular coupling and chemical reactions behind the bonding occurring at the surfaces were characterized by water contact angle measurement and X-ray photoelectron spectroscopy (XPS) analysis. The reliability of bonded PDMS-SU-8 samples was examined by using tensile strength and leakage tests, which revealed a bonding strength of over 1.4 MPa. The presented bonding method was also applied to create a metal-SU-8-PDMS hybrid device, which integrated SU-8 microfluidic structures and microelectrodes. This hybrid system was used for the effective trapping of microparticles on-chip, and the selective releasing and identification of predefined trapped microparticles. The hybrid fabrication approach presented here, based on the PDMS-SU-8 bonding, enables multifunctional integration in complex microfluidic devices. View Full-Text
Keywords: bonding; PDMS; SU-8; microfluidics; multifunctional integration; cell trapping; negative dielectrophoretic (nDEP); impedance measurement bonding; PDMS; SU-8; microfluidics; multifunctional integration; cell trapping; negative dielectrophoretic (nDEP); impedance measurement
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhu, Z.; Chen, P.; Liu, K.; Escobedo, C. A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device. Micromachines 2016, 7, 230.

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