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Micromachines 2015, 6(4), 473-486;

Low Flow Liquid Calibration Setup

Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
This paper is an extended version of our paper published in the 2nd International Conference on Microfluidic Handling Systems, Freiburg, Germany, 8–10 October 2014.
Author to whom correspondence should be addressed.
Academic Editor: Nam-Trung Nguyen
Received: 27 February 2015 / Revised: 16 April 2015 / Accepted: 17 April 2015 / Published: 22 April 2015
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This article describes a primary calibration setup, and its uncertainty, for low flow liquid calibrations at Bronkhorst High-Tech. It will be used to calibrate reference flow meters from 1 to 200 g/h. By setting up an uncertainty budget for this setup, the calibration of the instruments can be compared to that of NMI’s (National Metrology Institutes). The uncertainty budget consists of mass, time and mass flow uncertainties/corrections that need to be taken in to account for determining the traceable mass flow. Tests results of different flow meters/actuators measured on the setup support the calculated uncertainty. By participating in an intercomparison with NMI’s the measurement and uncertainty of this setup is traceable to European NMI’s. View Full-Text
Keywords: liquid mass flow; calibration; uncertainty budget liquid mass flow; calibration; uncertainty budget

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Platenkamp, T.H.; Sparreboom, W.; Ratering, G.H.J.M.; Katerberg, M.R.; Lötters, J. Low Flow Liquid Calibration Setup. Micromachines 2015, 6, 473-486.

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