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Micromachines 2015, 6(12), 1935-1945; doi:10.3390/mi6121466

Measuring the Quality Factor in MEMS Devices

Department of Systems Design Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada
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Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 7 October 2015 / Revised: 26 November 2015 / Accepted: 1 December 2015 / Published: 8 December 2015
(This article belongs to the Special Issue NEMS and MEMS Packaging and Reliability)
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Abstract

This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area. View Full-Text
Keywords: quality factor; MEMS; particle swarm optimization; logarithmic decrement quality factor; MEMS; particle swarm optimization; logarithmic decrement
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ozdemir, S.; Akhtar, S.; Gunal, O.E.; Khater, M.E.; Saritas, R.; Abdel-Rahman, E.M.; Yavuz, M. Measuring the Quality Factor in MEMS Devices. Micromachines 2015, 6, 1935-1945.

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