Measuring the Quality Factor in MEMS Devices
AbstractThis paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area. View Full-Text
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Ozdemir, S.; Akhtar, S.; Gunal, O.E.; Khater, M.E.; Saritas, R.; Abdel-Rahman, E.M.; Yavuz, M. Measuring the Quality Factor in MEMS Devices. Micromachines 2015, 6, 1935-1945.
Ozdemir S, Akhtar S, Gunal OE, Khater ME, Saritas R, Abdel-Rahman EM, Yavuz M. Measuring the Quality Factor in MEMS Devices. Micromachines. 2015; 6(12):1935-1945.Chicago/Turabian Style
Ozdemir, Savas; Akhtar, Sohail; Gunal, Ozgur E.; Khater, Mahmoud E.; Saritas, Resul; Abdel-Rahman, Eihab M.; Yavuz, Mustafa. 2015. "Measuring the Quality Factor in MEMS Devices." Micromachines 6, no. 12: 1935-1945.