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Micromachines 2014, 5(4), 929-942; doi:10.3390/mi5040929

Electromagnetic Micromotors—Design, Fabrication and Applications

Institute of Microtechnology, Technische Universität Braunschweig, 38124 Braunschweig, Germany
Received: 24 September 2014 / Accepted: 20 October 2014 / Published: 24 October 2014
(This article belongs to the Special Issue Microactuators)
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Abstract

Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years. View Full-Text
Keywords: electromagnetic microactuators; variable reluctance micromotors; synchronous micromotors; micropumps; micropositioners; microrobots electromagnetic microactuators; variable reluctance micromotors; synchronous micromotors; micropumps; micropositioners; microrobots
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Büttgenbach, S. Electromagnetic Micromotors—Design, Fabrication and Applications. Micromachines 2014, 5, 929-942.

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