Next Article in Journal
Previous Article in Journal
Materials 2013, 6(9), 4259-4267; doi:10.3390/ma6094259
Article

Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation

1,* , 1
, 2,3
 and 2,3
Received: 31 July 2013; in revised form: 9 September 2013 / Accepted: 17 September 2013 / Published: 23 September 2013
Download PDF [496 KB, uploaded 23 September 2013]
Abstract: Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission electron microscopy (XTEM) and selected area diffraction (SAD) analyses. Instead XTEM observations suggest that these “instabilities” resulted from the sudden nucleation of dislocations propagating along the slip systems lying on the {0001} basal planes and the  pyramidal planes commonly observed in hexagonal compound semiconductors. Based on this scenario, an energetic estimation of dislocation nucleation is made.
Keywords: nanoindentation; pop-ins; AlN thin films; transmission electron microscopy nanoindentation; pop-ins; AlN thin films; transmission electron microscopy
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Jian, S.-R.; Tseng, Y.-C.; Teng, I.-J.; Juang, J.-Y. Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation. Materials 2013, 6, 4259-4267.

AMA Style

Jian S-R, Tseng Y-C, Teng I-J, Juang J-Y. Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation. Materials. 2013; 6(9):4259-4267.

Chicago/Turabian Style

Jian, Sheng-Rui; Tseng, Yu-Chin; Teng, I-Ju; Juang, Jenh-Yih. 2013. "Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation." Materials 6, no. 9: 4259-4267.


Materials EISSN 1996-1944 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert