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Sensors 2009, 9(8), 6046-6057; doi:10.3390/s90806046
Article

Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors

 and *
Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751, Korea
* Author to whom correspondence should be addressed.
Received: 16 July 2009 / Revised: 27 July 2009 / Accepted: 28 July 2009 / Published: 29 July 2009
(This article belongs to the Section Biosensors)
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Abstract

This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increased. The effect of the cantilever profile change and the cantilever cross-section shape change is first investigated separately and then together. A finite element code ANSYS Multiphysics is used and solid finite elements cantilever models are solved. A surface stress of 0.05 N/m was applied to the top surface of the cantilevers. The cantilevers are made of silicon with elastic modulus 130 GPa and Poisson’s ratio 0.28. To show the conformity of this study, the numerical results are compared against their analytical ones. Results show that triangular and step cantilevers have better deflection and frequency characteristics than rectangular ones.
Keywords: biosensor; surface stress; microcantilever; resonant frequency; deflection biosensor; surface stress; microcantilever; resonant frequency; deflection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Ansari, M.Z.; Cho, C. Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors. Sensors 2009, 9, 6046-6057.

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