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Sensors 2009, 9(4), 2895-2906; doi:10.3390/s90402895

A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

2,*  and 2,*
1 Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taiwan, Taiwan 106 2 Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung, Taiwan 912
* Authors to whom correspondence should be addressed.
Received: 31 March 2009 / Revised: 17 April 2009 / Accepted: 21 April 2009 / Published: 21 April 2009
(This article belongs to the Special Issue Gas Sensors 2009)
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In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This causes a change in the electrical conductivity of the WO3 film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parameters. It is found that the sensitivity of the gas sensor is optimized at a working temperature of 300 °C. At the optimal working temperature, the experimental results show that the sensor has a high degree of sensitivity (1.0 KΩ ppm-1), a low detection limit (0.2 ppm) and a rapid response time (35 s).
Keywords: benzene; gas sensor; MEMS; micro-heater; WO3 thin film benzene; gas sensor; MEMS; micro-heater; WO3 thin film
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Ke, M.-T.; Lee, M.-T.; Lee, C.-Y.; Fu, L.-M. A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer. Sensors 2009, 9, 2895-2906.

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