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Journal: Sensors, 2009
Volume: 9
Page(s): 2470-2477
2470-2477
Article: Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH
Lu, R.; Wu, Y.; Cheng, H.; Yang, H.; Li, X.; Wang, Y.

http://www.mdpi.com/1424-8220/9/4/2470

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