Sensors 2009, 9(4), 2478-2490; doi:10.3390/s90402478
Article

Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors

1, 2email and 1, 3,* email
1 Graduate School of Engineering Science and Technology, National Yunlin University of Science and Technology / 123, 3 sec. University, Douliou, Yunlin, Taiwan R.O.C. 2 Department of Information Management, Transworld of Institute of Technology / 1221, Jen-Nang Rd., Chia-Tong Li, Douliou, Yunlin, Taiwan R.O.C. 3 Graduate School of Electronic Engineering, National Yunlin University of Science and Technology/ 123, 3 sec. University, Douliou, Yunlin, Taiwan R.O.C.
* Author to whom correspondence should be addressed.
Received: 12 February 2009; in revised form: 27 March 2009 / Accepted: 31 March 2009 / Published: 9 April 2009
(This article belongs to the Section Chemical Sensors)
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Abstract: ThepH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a 99.9% ruthenium target on p-type silicon substrates using radio frequency (r.f.) sputtering with N2 gas. Subsequently, the nanometric structure and surface morphology of RuN thin films were determined. The sensitivity of the RuN sensing membrane pH sensor was 58.03 mV/pH, obtained from ID-VG curves with a current-voltage (I-V) measurement system in standard buffer solutions from pH 1 to pH 13 at room temperature (25 °C). Moreover, the nonideal characteristics of the RuN sensing membrane, such as temperature coefficient, drift with light influence, drift rate and hysteresis width, etc. were also investigated. Finally, the sensing characteristics of the RuN membrane were compared with titanium nitride (TiN), aluminum nitride (AlN) and silicon nitride (Si3N4) membranes.
Keywords: Ruthenium nitride; ion selective electrode; temperature coefficient; light influence; drift rate; hysteresis width

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MDPI and ACS Style

Liao, Y.-H.; Chou, J.-C. Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors. Sensors 2009, 9, 2478-2490.

AMA Style

Liao Y-H, Chou J-C. Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors. Sensors. 2009; 9(4):2478-2490.

Chicago/Turabian Style

Liao, Yi-Hung; Chou, Jung-Chuan. 2009. "Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors." Sensors 9, no. 4: 2478-2490.

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