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Journal: Sensors, 2009
Volume: 9
Page(s): 2062-2075
2062-2075
Article: Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage
Kao, P.-H.; Dai, C.-L.; Hsu, C.-C.; Lee, C.-Y.

http://www.mdpi.com/1424-8220/9/3/2062

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