Sensors 2009, 9(2), 869-880; doi:10.3390/s90200869
Article

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

1 Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan, ROC 2 Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan, ROC
* Author to whom correspondence should be addressed.
Received: 13 December 2008; in revised form: 15 January 2009 / Accepted: 9 February 2009 / Published: 10 February 2009
(This article belongs to the Special Issue Gas Sensors 2009)
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Abstract: This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
Keywords: Ammonia sensor; CMOS; Polyaniline; readout circuit

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MDPI and ACS Style

Liu, M.-C.; Dai, C.-L.; Chan, C.-H.; Wu, C.-C. Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique. Sensors 2009, 9, 869-880.

AMA Style

Liu M-C, Dai C-L, Chan C-H, Wu C-C. Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique. Sensors. 2009; 9(2):869-880.

Chicago/Turabian Style

Liu, Mao-Chen; Dai, Ching-Liang; Chan, Chih-Hua; Wu, Chyan-Chyi. 2009. "Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique." Sensors 9, no. 2: 869-880.

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