Sensors 2009, 9(12), 9533-9543; doi:10.3390/s91209533
Article

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China
* Author to whom correspondence should be addressed.
Received: 18 September 2009; in revised form: 29 October 2009 / Accepted: 15 November 2009 / Published: 27 November 2009
(This article belongs to the Section Physical Sensors)
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Abstract: In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors.
Keywords: hot-film flow sensor; flexible printed circuit board; flow measurement

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MDPI and ACS Style

Liu, P.; Zhu, R.; Que, R. A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements. Sensors 2009, 9, 9533-9543.

AMA Style

Liu P, Zhu R, Que R. A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements. Sensors. 2009; 9(12):9533-9543.

Chicago/Turabian Style

Liu, Peng; Zhu, Rong; Que, Ruiyi. 2009. "A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements." Sensors 9, no. 12: 9533-9543.

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