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Sensors 2009, 9(12), 9533-9543; doi:10.3390/s91209533
Article

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

,
*  and
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China
* Author to whom correspondence should be addressed.
Received: 18 September 2009 / Revised: 29 October 2009 / Accepted: 15 November 2009 / Published: 27 November 2009
(This article belongs to the Section Chemical Sensors)
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Abstract

In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors.
Keywords: hot-film flow sensor; flexible printed circuit board; flow measurement hot-film flow sensor; flexible printed circuit board; flow measurement
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Liu, P.; Zhu, R.; Que, R. A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements. Sensors 2009, 9, 9533-9543.

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