Next Article in Journal
Determination of Viscoelastic Property in Polyethylene Crystallization Using a Quartz Crystal Resonator
Previous Article in Journal
DNA Hybridization Sensors Based on Electrochemical Impedance Spectroscopy as a Detection Tool
Article Menu

Export Article

Open AccessArticle
Sensors 2009, 9(12), 9533-9543; doi:10.3390/s91209533

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China
*
Author to whom correspondence should be addressed.
Received: 18 September 2009 / Revised: 29 October 2009 / Accepted: 15 November 2009 / Published: 27 November 2009
(This article belongs to the Section Chemical Sensors)
View Full-Text   |   Download PDF [404 KB, uploaded 21 June 2014]   |  

Abstract

In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors. View Full-Text
Keywords: hot-film flow sensor; flexible printed circuit board; flow measurement hot-film flow sensor; flexible printed circuit board; flow measurement
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Liu, P.; Zhu, R.; Que, R. A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements. Sensors 2009, 9, 9533-9543.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top