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Sensors 2009, 9(12), 9533-9543; doi:10.3390/s91209533

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China
Author to whom correspondence should be addressed.
Received: 18 September 2009 / Revised: 29 October 2009 / Accepted: 15 November 2009 / Published: 27 November 2009
(This article belongs to the Section Chemical Sensors)
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In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors. View Full-Text
Keywords: hot-film flow sensor; flexible printed circuit board; flow measurement hot-film flow sensor; flexible printed circuit board; flow measurement

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Liu, P.; Zhu, R.; Que, R. A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements. Sensors 2009, 9, 9533-9543.

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