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A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, P.R. China
* Author to whom correspondence should be addressed.
Received: 11 November 2008; in revised form: 17 December 2008 / Accepted: 19 January 2009 / Published: 23 January 2009
Abstract: A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedom are analyzed by modeling and simulation of the structure. For the deflection angle measurement, piezoresistors are integrated in the micro scanner. The appropriate directions and crystal orientations of the piezoresistors are designed to obtain the large piezoresistive coefficients for the high sensitivities. Wheatstone bridges are used to measure the deflection angles of each direction independently and precisely. The scanner is fabricated and packaged with the piezoelectric actuator and the piezoresistors detection circuits in a size of 28 mm×20 mm×18 mm. The experiment shows that the two scanning frequencies are 216.8 Hz and 464.8 Hz, respectively. By an actuation displacement of 10 μm, the scanning range of the two-dimensional micro scanner is above 26º × 23º. The deflection angle measurement sensitivities for two directions are 59 mV/deg and 30 mV/deg, respectively.
Keywords: Micro-optical-electro mechanical system; Two-dimensional scanning; Micro scanner; Piezoelectric actuator; Piezoresistor
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MDPI and ACS Style
Zhang, C.; Zhang, G.; You, Z. A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors. Sensors 2009, 9, 631-644.
Zhang C, Zhang G, You Z. A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors. Sensors. 2009; 9(1):631-644.
Zhang, Chi; Zhang, Gaofei; You, Zheng. 2009. "A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors." Sensors 9, no. 1: 631-644.