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Journal: Sensors, 2009
Volume: 9
Page(s): 556-567
556-567
Article: Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach
Mariani, S.; Ghisi, A.; Corigliano, A.; Zerbini, S.

http://www.mdpi.com/1424-8220/9/1/556

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