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Sensors 2008, 8(3), 1595-1612; doi:10.3390/s8031595

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

1,* , 1, 1, 2, 1, 3, 1, 1 and 1
1 MIC – Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark 2 Now at PhotoSolar ApS, Denmark 3 Now at HARTING Mitronics AG, Switzerland
* Author to whom correspondence should be addressed.
Received: 2 November 2007 / Accepted: 3 March 2008 / Published: 10 March 2008
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Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.
Keywords: SU-8; cantilever based sensing; label-free SU-8; cantilever based sensing; label-free
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Nordström, M.; Keller, S.; Lillemose, M.; Johansson, A.; Dohn, S.; Haefliger, D.; Blagoi, G.; Havsteen-Jakobsen, M.; Boisen, A. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods. Sensors 2008, 8, 1595-1612.

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