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Sensors 2008, 8(3), 1595-1612; doi:10.3390/s8031595
Review

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

1,* , 1, 1, 2, 1, 3, 1, 1 and 1
Received: 2 November 2007; Accepted: 3 March 2008 / Published: 10 March 2008
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Abstract: Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.
Keywords: SU-8; cantilever based sensing; label-free SU-8; cantilever based sensing; label-free
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Nordström, M.; Keller, S.; Lillemose, M.; Johansson, A.; Dohn, S.; Haefliger, D.; Blagoi, G.; Havsteen-Jakobsen, M.; Boisen, A. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods. Sensors 2008, 8, 1595-1612.

AMA Style

Nordström M, Keller S, Lillemose M, Johansson A, Dohn S, Haefliger D, Blagoi G, Havsteen-Jakobsen M, Boisen A. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods. Sensors. 2008; 8(3):1595-1612.

Chicago/Turabian Style

Nordström, Maria; Keller, Stephan; Lillemose, Michael; Johansson, Alicia; Dohn, Søren; Haefliger, Daniel; Blagoi, Gabriela; Havsteen-Jakobsen, Mogens; Boisen, Anja. 2008. "SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods." Sensors 8, no. 3: 1595-1612.



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